Rapid Thermal Process
Both ATM and Vacuum platforms are available, each consisting of two to three chambers.
Modular
chamber structures are also available.
- The ARES™-RTP (Rapid Thermal Process) series provides solutions for ion implantation, annealing, SPIKE and oxidation processes in semiconductor manufacturing processes. The RTP process, which can process wafers at high temperatures in a short period of time, uses halogen lamps to minimize the impact of temperature changes.
- ATST's ARES™-RTP series provides good temperature uniformity, wafer rotation, radiation energy correction and intelligent temperature control. In addition, the self-developed software can be optimized to meet the various needs of customers.
- The ARES™-RTP series has been installed in more than 150 DRAM/NAND manufacturing companies. Based on the technology verified at the manufacturing site, it successfully entered the Chinese market in 2020.
RTP Line-Up
